Grinding of silicon wafers: A review from historical
2008.10.1 This review paper discusses historical perspectives on grinding of silicon wafers, impacts of wafer size progression on applications of grinding in silicon wafer manufacturing, and interrelationships between grinding and two other silicon machining
MoreSurface Grinding in Silicon Wafer Manufacturing - Kansas State
surface grinding possesses the great potential of producing silicon wafers with lower cost and better quality comparing with its counterparts (lapping for wire- sawn wafers and
MoreEffects of grinding media on the material properties and
2021.1.1 As such, if used to replace charcoal in industrial silicon production, it will increase the reducing agent reactivity and enhance the ore furnace’s gas permeability.
MoreInvestigation of machining mechanism of monocrystalline silicon
2017.5.5 This paper examines the effects of grinding speeds and diamond tool radius on the monocrystalline silicon machining mechanism of nanometric grinding
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